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1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System

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SKU# STF1200cvd

A$ 13,580.00 A$ 13,580.00 13580.0 AUD

A$ 6,590.00

Excl. GST
  • Vacuum setup
  • Tube furnace
  • Digital vacuum gauge
  • RF generator
  • Gas mixing system
  • Channel 1
  • Channel 2
  • Channel 3
  • Channel 4
  • Channel 5
  • Channel 6
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SKU # : STF1200cvd

Terms and Conditions
 

VACUUM PUMP MOBILE CART ONLY AVAILABLE IF YOU PURCHASE A PUMP AND A DIGITAL VACUUM CONTROLLER.

STF1200 series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Eurotherm® 8-segment (5 programs max) digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.

 




Features

  • Compact, portable and lightweight design.
  • Lower processing temperatures required compare to conventional CVDs.
  • Film stress can be controlled by high/low frequency mixing techniques.
  • Split furnace chamber for fast and easy tube access.
  • Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
  • Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.
  • Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)
  • Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.
  • Built-in computer interface.
  • Long life type K thermocouple.
  • Slidable furnace option gives you ultra fast cooling rates

Safety

  • Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions.
  • Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.

Furnace, vacuum pump and gas mixing system specifications

 Tube material Quartz
 Heating element Kanthal® (Sweden) A1 2.0 resistance coil wire
 Max. vs constant working temperatures 1200°C max. and 1100°C constant
 Thermo couple type K
 Refractory lining Mitsubishi® (Japan) 1500 grade fiber alumina
 Temperature controller Eurotherm® 3204 with 5 patterns and 8 segments
 Maximum heating rate   < 30°C / min
 Temperature controller precision
 +/- 1°C
 Vacuum sealing flange kit

 Stainless steel vacuum sealing flanges with one vacuum gauge,
two valves and four thermal ceramic blocks.      

 Electrical requirements
 220-240V, 50/60 Hz, single phase
 Single-zone 1200°C max furnace detail specs
 Click here for more info
 Dual-zone 1200°C max furnace detail specs
 Click here for more info
 Three-zone 1200°C max furnace detail specs
 Click here for more info
 Gas mixing system detail specs
 Click here for more info
 Vacuum pump detail specs Click here for more info
 Download Product brochure


 RF generator specifications

 Electrical requirements 220-240V 50/60 Hz
 Output power 5 to 500 watts, adjustable in +/-1% step
 RF frequency
 13 MHz with +/-0.005% stability
 Reflection power
 200 watts max.
 Matching Automatic
 RF output port
 50 Ω, N-type, female
 Cooling Air

 
How to Program Across International Furnaces


 

Standard Package

 

Part description    

 

   

  Quantity  

 

 

Part image 

 

 STF1200 split tube furnace
 1 set
 Multi-channel gas supply system1 set
 Plasma RF power supply (optional)
1 set
 Vacuum pump and enclosure (optional)
 1 set 
 Quartz tube
1 pc

 Analog flow meter1 pc
 Stainless steel vacuum sealing flanges w/ pressure meter 
 1 set


 Stainless steel hook
 1 pc


 Alumina ceramic thermal block
 2 pairs


 Thermal gloves 1 pair

 Spare fuse2 pcs

 USB/RS485 computer interface kit 1 set

 Furnace and Shimaden controller manual2 pcs