LE800 is an equipment for sending liquid vapor to AI CVD system for many further processing.
The liquid flow is controlled by a peristaltic pump. After the liquid is sent to the gas mixing system by the peristaltic pump, it is heated by the heater in the system. The vapor is then brought into the furnace tube by the gas such as hydrogen, nitrogen, or argon as the carrier gas output from the gas supply system. LE800 can send out different liquids, such as: H2O, CH5OH, TiCl4r, SiHCl3, and Zn(C2H5)2, as well as a variety of organic compounds. This equipment is widely used in various CVD, catalytic reaction and activation experiments using non-corrosive liquid source vapor.
AC 220-240V 50/60Hz
Resistance wire heating maximum temperature
Maximum temperature of heating belt
Recommended heating rate
Less than 30℃/min
Temperature control method
Fuzzy PID control and self-tuning adjustment, intelligent 30-segment programmable control
Temperature control accuracy
Gas Flow Control System
Gas flow rate is controlled by float flowmeter
· Range: 0-500mml/minute (adjustable)
· Two stainless steel needle valves are installed on the panel to control the in and out of gas
· Outlet size: 6mm OD
· This system can be connected with all our tube furnaces and CVD systems
· A heating tape can be selected and wrapped around the externally connected pipe to ensure that the liquid vapor will not liquefy during transmission
Heating element 1
Electric heating belt (for heat preservation)
Heating element 2
Resistance wire (the heater uses a resistance wire)
350x250x (300~500 adjustable) mm
Equipment net weight
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