LE800 is an equipment for sending liquid vapor to AI CVD system for many further processing.
The liquid flow is controlled by a peristaltic pump. After the liquid is sent to the gas mixing system by the peristaltic pump, it is heated by the heater in the system. The vapor is then brought into the furnace tube by the gas such as hydrogen, nitrogen, or argon as the carrier gas output from the gas supply system. LE800 can send out different liquids, such as: H2O, CH5OH, TiCl4r, SiHCl3, and Zn(C2H5)2, as well as a variety of organic compounds. This equipment is widely used in various CVD, catalytic reaction and activation experiments using non-corrosive liquid source vapor.
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